Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333973 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Eun Sol Jo | 2022-05-17 |
| 11150554 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Junyeob Lee | 2021-10-19 |
| 11036131 | Resist composition, method of forming resist pattern, and compound | Takashi Nagamine, Tsuyoshi Nakamura | 2021-06-15 |
| 11036132 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Tsuyoshi Nakamura, Masafumi FUJISAKI | 2021-06-15 |
| 10534264 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Junyeob Lee | 2020-01-14 |
| 10534263 | Resin composition and method of forming resist pattern | Tsuyoshi Nakamura, Junyeob Lee | 2020-01-14 |
| 9529266 | Method of forming pattern | Tomohiro Oikawa | 2016-12-27 |
| 9274424 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Naoto Motoike, Junichi Tsuchiya, Yoichi Hori | 2016-03-01 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Naoto Motoike, Yoshitaka Komuro, Tomoyuki Hirano, Masatoshi Arai | 2016-01-12 |
| 9052592 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Akiya Kawaue, Takayoshi Mori | 2015-06-09 |