Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9040220 | Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern | Hideo Hada, Yoshiyuki Utsumi, Keita Ishiduka, Kensuke Matsuzawa, Fumitake Kaneko +2 more | 2015-05-26 |
| 9034556 | Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern | Hideo Hada, Yoshiyuki Utsumi, Keita Ishiduka, Kensuke Matsuzawa, Fumitake Kaneko +2 more | 2015-05-19 |
| 8519073 | Compound and polymeric compound | Yoshiyuki Utsumi, Hiroaki Shimizu, Toshiharu Shimamaki, Kenshin Niwa, Seihin Shu | 2013-08-27 |
| 8105747 | Positive resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Hiroaki Shimizu, Yasuhiro Yoshii | 2012-01-31 |
| 8105749 | Polymer compound, positive resist composition, and method of forming resist pattern | Takahiro Dazai, Takayoshi Mori, Hiroaki Shimizu | 2012-01-31 |
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Keita Ishiduka, Akiya Kawaue | 2011-06-07 |
| 7776510 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Keita Ishiduka, Akiya Kawaue, Hiroaki Shimizu +4 more | 2010-08-17 |
| 7745098 | Polymer compound, positive resist composition and method of forming resist pattern | Takahiro Dazai, Takayoshi Mori, Hiroaki Shimizu, Komei Hirahara | 2010-06-29 |
| 7741009 | Positive resist composition and method of forming resist pattern | Takahiro Dazai, Hiroaki Shimizu, Komei Hirahara | 2010-06-22 |
| 7488568 | Resist composition, method of forming resist pattern, compound and acid generator | Takeshi Iwai, Hideo Hada, Masaru Takeshita, Akiya Kawaue, Keita Ishiduka +6 more | 2009-02-10 |