Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11874601 | Resist composition, method of forming resist pattern, compound, and acid diffusion-controlling agent | — | 2024-01-16 |
| 11754922 | Resist composition and method of forming resist pattern | Masatoshi Arai | 2023-09-12 |
| 11703756 | Resist composition and method of forming resist pattern | Koshi Onishi, Masatoshi Arai, Yoshitaka Komuro | 2023-07-18 |
| 11693316 | Resist composition and method of forming resist pattern | Masatoshi Arai, Nobuhiro MICHIBAYASHI | 2023-07-04 |
| 11099479 | Resist composition, method of forming resist pattern, polymeric compound, and copolymer | Takashi Nagamine, Hideto Nito, Masafumi FUJISAKI, Tatsuya Fujii, Yuki FUKUMURA +3 more | 2021-08-24 |
| 10414918 | Method of preparing polymer compound | Yoshitaka Komuro, Masatoshi Arai, Koshi Onishi, Masahiro SHIOSAKI, Takuya Ikeda +1 more | 2019-09-17 |
| 10295905 | Resist composition, method for forming resist pattern, and polymer compound | Yoshitaka Komuro, Masatoshi Arai, Koshi Onishi, Takaya Maehashi | 2019-05-21 |