Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153347 | Organically modified metal oxide nanoparticle, method for producing the same, EUV photoresist material, and method for producing etching mask | Kiwamu Sue | 2024-11-26 |
| 11747724 | Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method | Kiwamu Sue, Yusuke YOSHIGOE, Takatoshi Inari, Masatoshi Arai, Takaya Maehashi +2 more | 2023-09-05 |
| 11028106 | Method for producing tetraalkoxysilane | Norihisa Fukaya, Seong-Jib Choi, Jun-Chul Choi, Toshio Horikoshi, Thuy Duong NGUYEN +3 more | 2021-06-08 |