Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429740 | Method of recovering resist pattern | Junichi Tsuchiya, Daichi Takaki, Miki Shinomiya, Masafumi FUJISAKI | 2019-10-01 |
| 9696625 | Method of forming resist pattern | Tomoyuki Hirano, Junichi Tsuchiya, Tomonari SUNAMICHI, Takayoshi Mori | 2017-07-04 |
| 9618845 | Method for forming resist pattern, resist pattern splitting agent, split pattern improving agent, resist pattern splitting material, and positive resist composition for forming split pattern | Yoichi Hori, Takayoshi Mori, Ryoji Watanabe | 2017-04-11 |
| 9581909 | Method of trimming resist pattern | Ryoji Watanabe, Yoichi Hori | 2017-02-28 |
| 9459528 | Negative tone resist composition for solvent developing and method of forming resist pattern | Tomohiro Oikawa, Yusuke Suzuki, Jiro Yokoya | 2016-10-04 |