Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429740 | Method of recovering resist pattern | Junichi Tsuchiya, Rikita Tsunoda, Daichi Takaki, Masafumi FUJISAKI | 2019-10-01 |
| 9890233 | Resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Kotaro Endo, Yuta Iwasawa | 2018-02-13 |
| 9682951 | Resist composition, method of forming resist pattern, acid generator, photoreactive quencher, and compound | Takashi Nagamine, Kotaro Endo | 2017-06-20 |
| 9671690 | Resist composition, method for forming resist pattern, photo-reactive quencher and compound | Takashi Nagamine, Daichi Takaki | 2017-06-06 |