Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8742038 | Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound | Daiju Shiono, Takahiro Dazai, Tomoyuki Hirano, Takayoshi Mori | 2014-06-03 |
| 8642244 | Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound | Daiju Shiono, Takahiro Dazai, Tomoyuki Hirano, Takayoshi Mori | 2014-02-04 |
| 8475997 | Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing polymeric compound | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai, Hiroaki Shimizu, Tsuyoshi Kurosawa +2 more | 2013-07-02 |
| 8298745 | Polymeric compound, positive resist composition, and method of forming resist pattern | Takahiro Dazai, Shinichi Kohno | 2012-10-30 |
| 8221956 | Resist composition for immersion exposure, method of forming resist pattern, and flourine-containing polymeric compound | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai, Hiroaki Shimizu, Tsuyoshi Kurosawa +2 more | 2012-07-17 |
| 8088553 | Positive resist composition, method of forming resist pattern, and polymeric compound | Hiroaki Shimizu, Tsuyoshi Nakamura, Takayoshi Mori, Daiju Shiono, Tomoyuki Hirano +1 more | 2012-01-03 |
| 8025923 | Method for manufacturing a structure | Shigenori Fujikawa, Toyoki Kunitake, Hiromi Takaemoto, Mari Koizumi, Hideo Hada | 2011-09-27 |
| 7989138 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Takahiro Dazai, Takayoshi Mori, Ryoichi Takasu, Tomoyuki Hirano | 2011-08-02 |
| 7914967 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Takayoshi Mori, Takahiro Dazai, Ryoichi Takasu, Tomoyuki Hirano | 2011-03-29 |
| 7741008 | Positive resist composition, positive resist composition for thermal flow, and resist pattern forming method | Hideo Hada, Yusuke Nakagawa, Akiyoshi Yamazaki | 2010-06-22 |