Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972762 | Positive resist composition and method of forming resist pattern | Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada, Masaru Takeshita +2 more | 2011-07-05 |
| 7879527 | Method of producing positive resist composition, positive resist composition, and method of forming resist pattern | Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada | 2011-02-01 |
| 7695889 | Copolymer for semiconductor lithography and process for production thereof | Takanori Yamagishi, Tomo Oikawa, Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura +2 more | 2010-04-13 |