Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8859180 | Copolymer and composition for semiconductor lithography and process for producing the copolymer | Tomo Oikawa, Takayoshi Okada, Masaaki Kudo | 2014-10-14 |
| 8709698 | Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography | Minoru Iijima | 2014-04-29 |
| 8377625 | Method for producing a copolymer solution with a uniform concentration for semiconductor lithography | Ichiro Kato, Akiko Tanaka, Miyako Asano | 2013-02-19 |
| 8211615 | Copolymer for immersion lithography and compositions | Tomo Oikawa, Takayoshi Okada | 2012-07-03 |
| 8163852 | Resist polymer and method for producing the polymer | Tomo Oikawa, Ichiro Kato, Kazuhiko Mizuno, Satoshi Yamaguchi | 2012-04-24 |
| 8119321 | Resist polymer solution and process for producing the same | Hiromitsu Baba | 2012-02-21 |
| 8067516 | Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography | Minoru Iijima | 2011-11-29 |
| 8030419 | Process for producing polymer for semiconductor lithography | Ichiro Kato, Satoshi Yamaguchi, Kouzo Osaki, Yasuo Shibata, Isao Magara +2 more | 2011-10-04 |
| 7972762 | Positive resist composition and method of forming resist pattern | Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada, Kensuke Saisyo +2 more | 2011-07-05 |
| 7960494 | Copolymer for semiconductor lithography and process for producing the same | Masaaki Kudo, Satoshi Yamaguchi | 2011-06-14 |
| 7910282 | Copolymer for semiconductor lithography and producing method thereof, and composition | Takayoshi Okada, Satoshi Yamaguchi, Kiyomi Miki | 2011-03-22 |
| 7838606 | Production process of copolymer for semiconductor lithography | Ichiro Kato, Satoshi Yamaguchi | 2010-11-23 |
| 7695889 | Copolymer for semiconductor lithography and process for production thereof | Tomo Oikawa, Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada +2 more | 2010-04-13 |
| 7411097 | Thiol compound, copolymer and method for producing the copolymer | Takahito Mita | 2008-08-12 |
| 7342087 | Method for prevention of increase in particles in copolymer for semiconductor resist | Kazuhiko Mizuno | 2008-03-11 |
| 7220808 | Thiol compound, copolymer and method for producing the copolymer | Takahito Mita | 2007-05-22 |
| 7045582 | Preparation process of copolymer for semiconductor lithography and a copolymer for semiconductor lithography available by this process | Kazuhiko Mizuno, Tomo Oikawa, Ichiro Kato | 2006-05-16 |
| 4927979 | Process for the preparation of p-ethylphenol | Tsutomu Idai, Eiji Takahashi | 1990-05-22 |