Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8859180 | Copolymer and composition for semiconductor lithography and process for producing the copolymer | Tomo Oikawa, Masaaki Kudo, Takanori Yamagishi | 2014-10-14 |
| 8211615 | Copolymer for immersion lithography and compositions | Takanori Yamagishi, Tomo Oikawa | 2012-07-03 |
| 7910282 | Copolymer for semiconductor lithography and producing method thereof, and composition | Takanori Yamagishi, Satoshi Yamaguchi, Kiyomi Miki | 2011-03-22 |