Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347147 | Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition | Masamichi Hayakawa, Yoshiyuki Utsumi | 2022-05-31 |
| 11048166 | Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist composition | Masamichi Hayakawa, Yoshiyuki Utsumi | 2021-06-29 |
| 9850334 | Manufacturing method of polymer | Yuki Kawakami, Takeshi Ikeya | 2017-12-26 |