Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8586288 | Method of forming resist pattern | Tomoyuki Hirano | 2013-11-19 |
| 8541529 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya | 2013-09-24 |
| 8487056 | Positive resist composition and method of forming resist pattern | Tasuku Matsumiya, Tomoyuki Hirano, Takahiro Dazai, Kotaro Endo | 2013-07-16 |
| 8475997 | Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing polymeric compound | Tomoyuki Hirano, Sanae Furuya, Takahiro Dazai, Hiroaki Shimizu, Tsuyoshi Kurosawa +2 more | 2013-07-02 |
| 8450044 | Positive resist composition and method of forming resist pattern | Tomoyuki Hirano, Daichi Takaki | 2013-05-28 |
| 8440385 | Positive resist composition, method of forming resist pattern and polymeric compound | Tomoyuki Hirano, Masatoshi Arai | 2013-05-14 |
| 8404428 | Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compound | Tasuku Matsumiya, Tomoyuki Hirano, Takahiro Dazai | 2013-03-26 |
| 8404426 | Negative resist composition, method of forming resist pattern and polymeric compound | Sho Abe, Tomoyuki Hirano, Takahiro Dazai | 2013-03-26 |
| 8394578 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Takahiro Dazai | 2013-03-12 |
| 8389197 | Compound, positive resist composition and resist pattern forming method | Takako Hirosaki, Taku Hirayama, Hideo Hada | 2013-03-05 |
| 8367296 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Takahiro Dazai, Tasuku Matsumiya | 2013-02-05 |
| 8329378 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Tasuku Matsumiya, Takahiro Dazai | 2012-12-11 |
| 8304163 | Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern | Taku Hirayama, Toshiyuki Ogata, Shogo Matsumaru, Hideo Hada | 2012-11-06 |
| 8268529 | Positive resist composition, method of forming resist pattern using the same, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya, Masaru Takeshita | 2012-09-18 |
| 8257903 | Compound, positive resist composition and method for formation of resist pattern | Hideo Hada | 2012-09-04 |
| 8236477 | Positive resist composition and method of forming resist pattern | Tasuku Matsumiya, Tomoyuki Hirano, Takahiro Dazai, Kotaro Endo | 2012-08-07 |
| 8232041 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya | 2012-07-31 |
| 8227170 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya, Daichi Takaki, Takayoshi Mori +1 more | 2012-07-24 |
| 8221956 | Resist composition for immersion exposure, method of forming resist pattern, and flourine-containing polymeric compound | Tomoyuki Hirano, Sanae Furuya, Takahiro Dazai, Hiroaki Shimizu, Tsuyoshi Kurosawa +2 more | 2012-07-17 |
| 8206887 | Positive resist composition and resist pattern forming method | Takako Hirosaki, Taku Hirayama | 2012-06-26 |
| 8192915 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya | 2012-06-05 |
| 8182976 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Tasuku Matsumiya | 2012-05-22 |
| 8088553 | Positive resist composition, method of forming resist pattern, and polymeric compound | Hiroaki Shimizu, Tsuyoshi Nakamura, Takayoshi Mori, Sanae Furuya, Tomoyuki Hirano +1 more | 2012-01-03 |
| 8021823 | Positive resist composition, method of forming resist pattern, and polymeric compound | Hiroaki Shimizu, Tsuyoshi Nakamura, Takahiro Dazai, Tomoyuki Hirano | 2011-09-20 |
| 8017300 | Compound, positive resist composition and method for forming resist pattern | Taku Hirayama, Hideo Hada | 2011-09-13 |