Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655377 | Antireflection film and exposure method | Nobuyuki Matsuzawa, Yoko Watanabe, Boontarika Thunnakart, Ken Ozawa | 2010-02-02 |
| 7094994 | Heat treatment apparatus and method of semiconductor wafer | Kenichi Oyama, Atsushi Someya | 2006-08-22 |
| 6848198 | Heat treatment apparatus and method of heat treatment | — | 2005-02-01 |
| 6686121 | Process for preparing resists | Hiroshi Okazaki, Georg Pawlowski, Satoru Funato, Yoshiaki Kinoshita | 2004-02-03 |
| 6527966 | Pattern forming method | Koji Shimomura, Yoshiaki Kinoshita, Satoru Funato | 2003-03-04 |
| 6479210 | Chemically amplified resist composition | Yoshiaki Kinoshita, Satoru Funato | 2002-11-12 |
| 6358665 | Radiation-sensitive composition of chemical amplification type | Georg Pawlowski, Hiroshi Okazaki, Yoshiaki Kinoshita, Naoko Tsugama, Aritaka Hishida +1 more | 2002-03-19 |
| 6284427 | Process for preparing resists | Hiroshi Okazaki, Georg Pawlowski, Satoru Funato, Yoshiaki Kinoshita | 2001-09-04 |