Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9660182 | Plasma processing method and plasma processing apparatus | Takashi Sone, Daisuke Urayama, Nao Koizumi, Wataru Kume, Eiichi Nishimura +1 more | 2017-05-23 |
| 9419211 | Etching method and substrate processing apparatus | Eiichi Nishimura, Nao Koizumi, Takashi Sone, Fumiko Yamashita | 2016-08-16 |
| 9208997 | Method of etching copper layer and mask | Eiichi Nishimura, Takashi Sone, Akitaka Shimizu, Fumiko Yamashita | 2015-12-08 |
| 9165784 | Substrate processing method and storage medium | Eiichi Nishimura, Fumiko Yamashita | 2015-10-20 |
| 8962489 | Method for etching film containing cobalt and palladium | Eiichi Nishimura | 2015-02-24 |
| 8815495 | Pattern forming method and manufacturing method of semiconductor device | Eiichi Nishimura | 2014-08-26 |
| 8772172 | Semiconductor device manufacturing method and plasma etching apparatus | Eiichi Nishimura | 2014-07-08 |
| 8642136 | Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process | Eiichi Nishimura, Akitaka Shimizu | 2014-02-04 |
| 8530354 | Substrate processing method | Eiichi Nishimura | 2013-09-10 |
| 8491805 | Semiconductor device manufacturing method and plasma etching apparatus | Eiichi Nishimura | 2013-07-23 |
| 8491804 | Substrate processing method | Eiichi Nishimura | 2013-07-23 |
| 8383521 | Substrate processing method | Eiichi Nishimura, Fumiko Yamashita | 2013-02-26 |
| 8252698 | Substrate processing method | Eiichi Nishimura | 2012-08-28 |
| 8241511 | Substrate processing method | Eiichi Nishimura | 2012-08-14 |
| 8202805 | Substrate processing method | Eiichi Nishimura | 2012-06-19 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Genji Nakamura, Naoki Shindo +3 more | 2011-03-01 |
| 7811939 | Plasma etching method | Chie Kato, Akitaka Shimizu | 2010-10-12 |
| 7604908 | Fine pattern forming method | Akitaka Shimizu | 2009-10-20 |
| 7256135 | Etching method and computer storage medium storing program for controlling same | Masayuki Sawataishi, Akitaka Shimizu | 2007-08-14 |
| 7192532 | Dry etching method | Akiteru Koh, Toshihiro Miura, Takayuki Fukasawa, Akitaka Shimizu, Asao Yamashita +1 more | 2007-03-20 |