Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9660182 | Plasma processing method and plasma processing apparatus | Takashi Sone, Daisuke Urayama, Masato Kushibiki, Wataru Kume, Eiichi Nishimura +1 more | 2017-05-23 |
| 9419211 | Etching method and substrate processing apparatus | Eiichi Nishimura, Masato Kushibiki, Takashi Sone, Fumiko Yamashita | 2016-08-16 |