Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154790 | Etching method and plasma processing apparatus | Seiichi Watanabe, Manabu Sato, Hiroki Yamada, Shinji Orimo | 2024-11-26 |
| 11688650 | Etching method and substrate processing apparatus | Gaku Shimoda, Takanori Eto | 2023-06-27 |
| 11062881 | Plasma etching method and plasma processing device | Jun Hirose | 2021-07-13 |
| 9735021 | Etching method | Tomonori Miwa | 2017-08-15 |
| 9735025 | Etching method | Tomonori Miwa, Yuki Kaneko | 2017-08-15 |
| 9428838 | Plasma processing method and plasma processing apparatus | — | 2016-08-30 |
| 8282844 | Method for etching metal nitride with high selectivity to other materials | Akiteru Ko, Hiroyuki Takahashi | 2012-10-09 |
| 7256135 | Etching method and computer storage medium storing program for controlling same | Masato Kushibiki, Akitaka Shimizu | 2007-08-14 |