Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688650 | Etching method and substrate processing apparatus | Masayuki Sawataishi, Takanori Eto | 2023-06-27 |
| 9865471 | Etching method and etching apparatus | Hotaka Maruyama, Takanori Sato, Masafumi Urakawa, Masahiro Ogasawara | 2018-01-09 |