Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264248 | Etching method and substrate processing apparatus | Yoshimitsu Kon, Atsushi UTO, Lifu LI | 2022-03-01 |
| 9735021 | Etching method | Masayuki Sawataishi | 2017-08-15 |
| 9735025 | Etching method | Masayuki Sawataishi, Yuki Kaneko | 2017-08-15 |
| 9418863 | Method for etching etching target layer | Shin Hirotsu, Yoshiki Igarashi, Hiroshi Okada | 2016-08-16 |
| 7658816 | Focus ring and plasma processing apparatus | Akira Koshiishi, Hideaki Tanaka, Nobuyuki Okayama, Masaaki Miyagawa, Shunsuke Mizukami +5 more | 2010-02-09 |