Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Takaki Kobune, Hiroshi Tsujimoto | 2025-08-12 |
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Nobutaka SASAKI, Toshiki AKAMA, Shusei KATO, Gyeong min PARK +2 more | 2025-05-20 |
| 12217942 | Plasma processing apparatus | Hironobu Kudo, Hiroshi Tsujimoto | 2025-02-04 |
| 12148598 | Plasma processing apparatus | Takaki Kobune | 2024-11-19 |
| 11676800 | Substrate processing apparatus and control method of substrate processing apparatus | Ikko Tanaka, Hiroshi Tsujimoto, Atsushi TERASAWA | 2023-06-13 |
| 11264248 | Etching method and substrate processing apparatus | Yoshimitsu Kon, Atsushi UTO, Tomonori Miwa | 2022-03-01 |