Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Lifu LI, Hiroshi Tsujimoto | 2025-08-12 |
| 12315702 | Plasma processing apparatus | — | 2025-05-27 |
| 12165850 | Electrode for plasma processing apparatus and plasma processing apparatus | — | 2024-12-10 |
| 12148598 | Plasma processing apparatus | Lifu LI | 2024-11-19 |