AT

Atsushi TERASAWA

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Rifu, JP: #1,311 of 2,101 inventorsTop 65%
Overall (All Time): #2,589,045 of 4,157,543Top 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11676800 Substrate processing apparatus and control method of substrate processing apparatus Ikko Tanaka, Lifu LI, Hiroshi Tsujimoto 2023-06-13