Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830704 | Plasma processing apparatus and control method | Chishio Koshimizu | 2023-11-28 |
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Takenobu Ikeda, Koichi Nagami, Shinji Himori | 2023-09-19 |
| 11574798 | Plasma processing apparatus and control method | Chishio Koshimizu | 2023-02-07 |
| 10672589 | Plasma processing apparatus and control method | Chishio Koshimizu | 2020-06-02 |
| 9418863 | Method for etching etching target layer | Yoshiki Igarashi, Tomonori Miwa, Hiroshi Okada | 2016-08-16 |
| 9312105 | Method for etching insulation film | Akira Takahashi, Kei Nakayama, Yoshiki Igarashi | 2016-04-12 |
| 8097534 | Method for manufacturing semiconductor device and storage medium | Shuhei Ogawa | 2012-01-17 |
| 7943523 | Plasma etching method and computer readable storage medium | Wakako Naito, Yoshinori Suzuki | 2011-05-17 |
| 7465670 | Plasma etching method, plasma etching apparatus, control program and computer storage medium with enhanced selectivity | Shuhei Ogawa | 2008-12-16 |