Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943523 | Plasma etching method and computer readable storage medium | Shin Hirotsu, Yoshinori Suzuki | 2011-05-17 |
| 7211197 | Etching method and plasma processing method | Masaaki Hagihara, Koichiro Inazawa | 2007-05-01 |
| 6780342 | Method of etching and method of plasma treatment | Masaaki Hagihara, Koichiro Inazawa | 2004-08-24 |