Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373895 | Etching method and plasma processing apparatus | Fumiaki ARIYOSHI, Masanori ASAHARA, Shunsuke Aizawa | 2022-06-28 |
| 10410902 | Plasma processing apparatus | Yasuharu Sasaki | 2019-09-10 |
| 10141164 | Plasma processing apparatus and plasma processing method | Yasuharu Sasaki, Manabu Iwata | 2018-11-27 |
| 9953854 | Method of adsorbing target object on mounting table and plasma processing apparatus | Yasuharu Sasaki | 2018-04-24 |