Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593519 | Plasma processing apparatus | Norikazu Yamada, Koichi Nagami | 2020-03-17 |
| 10109461 | Plasma processing method | Norikazu Yamada, Koichi Nagami, Satoru Hamaishi, Koji Itadani | 2018-10-23 |
| 9754768 | Plasma processing method and plasma processing apparatus | Norikazu Yamada, Koichi Nagami | 2017-09-05 |
| 9734992 | Plasma processing apparatus | Norikazu Yamada, Koichi Nagami, Satoru Hamaishi, Koji Itadani | 2017-08-15 |
| 9355822 | Plasma processing apparatus | Norikazu Yamada, Koichi Nagami, Tatsuya Ikenari, Daisuke Maehara | 2016-05-31 |