Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769651 | High-frequency power supply device and output method of high-frequency power | Katsuyuki Fukano, Yuya Nakamori, Koji Itadani | 2023-09-26 |
| 10109461 | Plasma processing method | Norikazu Yamada, Toshifumi Tachikawa, Koichi Nagami, Koji Itadani | 2018-10-23 |
| 9734992 | Plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa, Koichi Nagami, Koji Itadani | 2017-08-15 |
| 8674619 | High frequency power supply device | Yuya Nakamori, Tatsuya Ikenari, Daisuke Maehara, Masao Umehara | 2014-03-18 |
| 7615983 | High frequency power device for protecting an amplifying element therein | Yoshiki Fukumoto, Kazutaka Sei | 2009-11-10 |