Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033833 | Filter circuit and plasma processing apparatus | Koji Yamagishi, Yuji Aota, Koichi Nagami | 2024-07-09 |
| 11569094 | Etching method and plasma processing apparatus | Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita | 2023-01-31 |