Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara, Jun Abe +1 more | 2023-02-28 |
| 11569094 | Etching method and plasma processing apparatus | Kota ISHIHARADA, Toshikatsu TOBANA, Shinya Morikita | 2023-01-31 |
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara, Jun Abe +1 more | 2022-02-15 |
| 11062882 | Plasma processing apparatus and plasma processing method | Yusuke Aoki, Shinya Morikita, Toshikatsu TOBANA | 2021-07-13 |