Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261027 | Plasma processing apparatus and plasma processing method | Koichi Nagami, Chishio Koshimizu, Jun Abe | 2025-03-25 |
| 12165849 | Plasma processing apparatus and etching method | — | 2024-12-10 |
| 12136541 | Wiring abnormality detection method and plasma processing apparatus | — | 2024-11-05 |
| 11646181 | Plasma processing apparatus and plasma processing method | Koichi Nagami | 2023-05-09 |
| 10727028 | Matching device and plasma processing apparatus | — | 2020-07-28 |
| 10431433 | Plasma processing apparatus and plasma processing method | Koichi Nagami | 2019-10-01 |