Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tsuyoshi Moriya, Tatsuo Matsudo, Hiroyuki Onoda | 2024-06-25 |
| 11935727 | Substrate processing method | Chishio Koshimizu | 2024-03-19 |
| 11578407 | Film-forming apparatus and film-forming method | — | 2023-02-14 |
| 11443920 | Plasma processing apparatus | Tatsuo Matsudo, Chishio Koshimizu | 2022-09-13 |
| 11315765 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Tatsuo Matsudo | 2022-04-26 |
| 10937631 | Plasma processing apparatus and plasma processing method | Tatsuo Matsudo, Chishio Koshimizu | 2021-03-02 |
| 10804076 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Kazuki Denpoh, Masashi Saito | 2020-10-13 |
| 10777392 | Substrate processing apparatus | Chishio Koshimizu | 2020-09-15 |
| 10325758 | Plasma processing apparatus | Tatsuo Matsudo, Chishio Koshimizu | 2019-06-18 |
| 10283328 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Tatsuo Matsudo | 2019-05-07 |
| 10211031 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu | 2019-02-19 |
| 10115614 | Transfer chamber and method for preventing adhesion of particle | Junji Oikawa, Hiroyuki Nakayama | 2018-10-30 |
| 9997332 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Chishio Koshimizu | 2018-06-12 |
| 9941097 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Kazuki Denpoh | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Kazuki Denpoh | 2018-02-20 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +2 more | 2017-02-28 |
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Shigehiro Miura, Chishio Koshimizu, Yohei Yamazawa | 2016-11-22 |
| 9385015 | Transfer chamber and method for preventing adhesion of particle | Junji Oikawa, Hiroyuki Nakayama | 2016-07-05 |
| 9349618 | Substrate processing apparatus | Chishio Koshimizu | 2016-05-24 |
| 9313872 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Kazuki Denpoh, Masashi Saito | 2016-04-12 |
| 9253867 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Chishio Koshimizu | 2016-02-02 |
| 9236226 | Plasma processing apparatus | Takafumi Kimura, Chishio Koshimizu | 2016-01-12 |
| 9111747 | Film deposition apparatus, substrate processing apparatus and film deposition method | Chishio Koshimizu, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi, Shigehiro Miura +1 more | 2015-08-18 |
| 9028139 | Method of measuring temperature of component in processing chamber of substrate processing apparatus | Chishio Koshimizu, Tatsuo Matsudo | 2015-05-12 |
| 9019505 | Temperature control system including sub-chiller | Chishio Koshimizu, Tatsuo Matsudo, Kenji Nagai | 2015-04-28 |