Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato +2 more | 2017-02-28 |
| 9236226 | Plasma processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2016-01-12 |
| 9167680 | Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method | Yohei Yamazawa, Chishio Koshimizu | 2015-10-20 |
| 9111747 | Film deposition apparatus, substrate processing apparatus and film deposition method | Jun Yamawaku, Chishio Koshimizu, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +1 more | 2015-08-18 |
| 8795750 | Method for manufacturing low-phosphorus whey | Nobuo Seki, Masatoshi Ohnishi, Kie Kinoshita, Yoshitaka Tamura, Hitoshi Saito +1 more | 2014-08-05 |
| 7508306 | Handheld RFID reader with display | Hiroshi Fujii | 2009-03-24 |
| 6949881 | Discharge lamp of the short arc type | Norihiro Inaoka | 2005-09-27 |
| 6024503 | Photograph developing apparatus | Tsukasa Nakano, Tomoya Tanaka, Yoshifumi Nakamura, Junichi Miyai | 2000-02-15 |
| 6025222 | Vapor phase growth of a dielectric film and a fabrication process of a semiconductor device having such a dielectric film | Hideaki Yamauchi, Masaaki Nakabayashi | 2000-02-15 |
| 5183510 | Apparatus and process for chemical vapor deposition | — | 1993-02-02 |
| 5107119 | Method of evaluating characteristics of superconductors and process and apparatus for forming superconductor film by using the method | Hiroshi Nakao, Hideki Yamawaki, Masaru Ihara, Keigo NAGASAKA | 1992-04-21 |
| 5037774 | Process for the production of semiconductor devices utilizing multi-step deposition and recrystallization of amorphous silicon | Hideki Yamawaki, Yoshihiro Arimoto, Shigeo Kodama, Masaru Ihara | 1991-08-06 |
| 4931425 | Process for chemical vapor deposition of superconductive oxide | Hideki Yamawaki, Kazuto Ikeda, Masaru Ihara | 1990-06-05 |