Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115614 | Transfer chamber and method for preventing adhesion of particle | Jun Yamawaku, Hiroyuki Nakayama | 2018-10-30 |
| 9385015 | Transfer chamber and method for preventing adhesion of particle | Jun Yamawaku, Hiroyuki Nakayama | 2016-07-05 |
| 8409328 | Substrate transfer device and substrate transfer method | Jun Yamawaku, Hiroyuki Nakayama | 2013-04-02 |
| 8398745 | Substrate processing apparatus and exhaust method therefor | Jun Yamawaku, Hiroyuki Nakayama | 2013-03-19 |