Issued Patents All Time
Showing 26–50 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742184 | Plasma processing apparatus and plasma processing method | — | 2023-08-29 |
| 11742183 | Plasma processing apparatus and control method | Ryuji Hisatomi, Michishige Saito | 2023-08-29 |
| 11742182 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742181 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742180 | Plasma processing method and plasma processing apparatus | — | 2023-08-29 |
| 11664196 | Detecting method and plasma processing apparatus | — | 2023-05-30 |
| 11581170 | Plasma processing apparatus and processing method | Shinji Kubota, Yuji Aota | 2023-02-14 |
| 11574798 | Plasma processing apparatus and control method | Shin Hirotsu | 2023-02-07 |
| 11562887 | Plasma processing apparatus and etching method | — | 2023-01-24 |
| 11532456 | Inspection method, inspection apparatus, and plasma processing apparatus | — | 2022-12-20 |
| 11476089 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2022-10-18 |
| 11446714 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Kazuya Dobashi | 2022-09-20 |
| 11443924 | Upper electrode and plasma processing apparatus | Gen TAMAMUSHI, Kazuya Nagaseki | 2022-09-13 |
| 11443920 | Plasma processing apparatus | Jun Yamawaku, Tatsuo Matsudo | 2022-09-13 |
| 11417502 | Plasma processing system and substrate processing method | — | 2022-08-16 |
| 11361947 | Apparatus for plasma processing and method of etching | — | 2022-06-14 |
| 11337297 | Plasma processing method and plasma processing apparatus | Takashi Dokan, Shinji Kubota | 2022-05-17 |
| 11315765 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Tatsuo Matsudo | 2022-04-26 |
| 11201034 | Plasma processing apparatus and control method | Ryuji Hisatomi, Michishige Saito | 2021-12-14 |
| 11017985 | Plasma processing apparatus, impedance matching method, and plasma processing method | Takashi Dokan, Shinji Kubota | 2021-05-25 |
| 10937631 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Tatsuo Matsudo | 2021-03-02 |
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2020-12-01 |
| 10847341 | Plasma processing apparatus | Naoki Matsumoto, Satoshi Tanaka, Toru Ito | 2020-11-24 |
| 10804076 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2020-10-13 |
| 10804072 | Plasma processing apparatus | Naoki Matsumoto, Satoshi Tanaka, Toru Ito | 2020-10-13 |