Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9028139 | Method of measuring temperature of component in processing chamber of substrate processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2015-05-12 |
| 9022645 | Plasma processing apparatus and temperature measuring method | — | 2015-05-05 |
| 9019505 | Temperature control system including sub-chiller | Jun Yamawaku, Chishio Koshimizu, Kenji Nagai | 2015-04-28 |
| 8986494 | Plasma processing apparatus and temperature measuring method and apparatus used therein | Chishlo Koshimizu, Jun Abe | 2015-03-24 |
| 8858753 | Focus ring heating method, plasma etching apparatus, and plasma etching method | Chishio Koshimizu, Jun Yamawaku, Masashi Saito | 2014-10-14 |
| 8824875 | Method for heating part in processing chamber of semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Jun Yamawaku, Chishio Koshimizu | 2014-09-02 |
| 8825434 | Temperature measuring method, storage medium, and program | Chishio Koshimizu, Jun Yamawaku | 2014-09-02 |
| 8777483 | Temperature measuring apparatus and temperature measuring method | Jun Yamawaku, Chishio Koshimizu, Kenji Nagai | 2014-07-15 |
| 8764288 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Chishio Koshimizu | 2014-07-01 |
| 8730482 | Method for measuring wear rate | Chisio Koshimizu | 2014-05-20 |
| 8703002 | Plasma processing apparatus, plasma processing method and storage medium | Shinji Himori, Noriaki Imai, Takeshi Ohse, Jun Abe, Takayuki Katsunuma | 2014-04-22 |
| 8651049 | Plasma processing apparatus | Shinji Himori | 2014-02-18 |
| 8585284 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2013-11-19 |
| 8573837 | Temperature measuring apparatus and temperature measuring method | Chishio Koshimizu | 2013-11-05 |
| 8523428 | Component in processing chamber of substrate processing apparatus and method of measuring temperature of the component | Jun Yamawaku, Chishio Koshimizu | 2013-09-03 |
| 8500326 | Probe for temperature measurement, temperature measuring system and temperature measuring method using the same | — | 2013-08-06 |
| 8486221 | Focus ring heating method, plasma etching apparatus, and plasma etching method | Chishio Koshimizu, Jun Yamawaku, Masashi Saito | 2013-07-16 |
| 8425791 | In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same | Chishio Koshimizu, Manabu Iwata | 2013-04-23 |
| 8182142 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Chishio Koshimizu | 2012-05-22 |
| 8144332 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2012-03-27 |
| 8070911 | Capacitive coupling plasma processing apparatus | Shinji Himori | 2011-12-06 |
| 7952717 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Chishio Koshimizu | 2011-05-31 |
| 7713431 | Plasma processing method | Tomoaki Ukei, Kimihiro Higuchi, Kazuki Denpoh | 2010-05-11 |
| 7582182 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Chishio Koshimizu, Sumie Segawa | 2009-09-01 |
| 7532322 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Chishio Koshimizu, Sumie Segawa | 2009-05-12 |