Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8703002 | Plasma processing apparatus, plasma processing method and storage medium | Tatsuo Matsudo, Shinji Himori, Takeshi Ohse, Jun Abe, Takayuki Katsunuma | 2014-04-22 |
| 7767055 | Capacitive coupling plasma processing apparatus | Shinji Himori, Katsumi Horiguchi, Takaaki Nezu, Shoichiro Matsuyama, Hiroki Matsumaru +5 more | 2010-08-03 |
| 7758929 | Plasma processing apparatus and method | Yohei Yamazawa | 2010-07-20 |