Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Hisataka Hayashi, Takeshi Kaminatsui, Shinji Himori, Norikazu Yamada +1 more | 2019-08-20 |
| 10032611 | Connection control method | Shinji Himori, Norikazu Yamada | 2018-07-24 |
| 9564287 | Substrate processing apparatus and substrate processing method using same | Shinji Himori, Jun Abe, Norikazu Yamada | 2017-02-07 |
| 8852387 | Plasma processing apparatus and shower head | Hachishiro Iizuka, Jun Abe, Akihiro Yokota | 2014-10-07 |
| 8821684 | Substrate plasma processing apparatus and plasma processing method | Akio Ui, Naoki Tamaoki, Takashi Ichikawa, Hisataka Hayashi, Takeshi Kaminatsui +3 more | 2014-09-02 |
| 8703002 | Plasma processing apparatus, plasma processing method and storage medium | Tatsuo Matsudo, Shinji Himori, Noriaki Imai, Jun Abe, Takayuki Katsunuma | 2014-04-22 |
| 8568606 | Substrate processing apparatus and substrate processing method using same | Shinji Himori, Jun Abe, Norikazu Yamada | 2013-10-29 |
| 8286581 | High frequency power source and its control method, and plasma processing apparatus | Toshihiro Hayami, Jun-Ichi Takahira, Jun Shimada | 2012-10-16 |