Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621151 | Upper electrode and plasma processing apparatus | — | 2023-04-04 |
| 11476132 | Sealing structure, vacuum processing apparatus and sealing method | Masahisa Watanabe, Yuichiro WAGATSUMA | 2022-10-18 |
| 11414754 | Film forming apparatus | — | 2022-08-16 |
| 9807862 | Plasma processing apparatus | — | 2017-10-31 |
| 9196461 | Plasma processing apparatus | — | 2015-11-24 |
| 9117633 | Plasma processing apparatus and processing gas supply structure thereof | — | 2015-08-25 |
| 8986495 | Plasma processing apparatus | — | 2015-03-24 |
| 8852386 | Plasma processing apparatus | Yuki Mochizuki, Jun Abe | 2014-10-07 |
| 8852387 | Plasma processing apparatus and shower head | Jun Abe, Akihiro Yokota, Takeshi Ohse | 2014-10-07 |
| 8758511 | Film forming apparatus and vaporizer | Akira Yasumuro, Koichiro Kimura, Norihiko Tsuji | 2014-06-24 |
| 8758550 | Shower head and plasma processing apparatus having same | — | 2014-06-24 |
| 8747609 | Plasma processing apparatus and shower head | Jun Abe, Yuki Mochizuki | 2014-06-10 |
| 8674607 | Plasma processing apparatus and processing gas supply structure thereof | — | 2014-03-18 |
| 8608903 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2013-12-17 |
| 8366828 | Shower head and substrate processing apparatus | — | 2013-02-05 |
| 8282769 | Shower head and plasma processing apparatus having same | — | 2012-10-09 |
| 8236106 | Shower head and substrate processing apparatus | Fumiko Kiriishi, Tsuyoshi Komiyama | 2012-08-07 |
| 8221581 | Gas supply mechanism and substrate processing apparatus | — | 2012-07-17 |
| 8152925 | Baffle plate and substrate processing apparatus | — | 2012-04-10 |
| 8052364 | Coupling member and plasma processing apparatus | Shojiro Yahata | 2011-11-08 |
| 8043471 | Plasma processing apparatus | — | 2011-10-25 |
| 7666260 | Vaporizer and semiconductor processing apparatus | — | 2010-02-23 |
| 7513954 | Plasma processing apparatus and substrate mounting table employed therein | Taro Ikeda | 2009-04-07 |
| D581012 | Middle plate for the shower head | Koichiro Kimura, Akira Yasumuro | 2008-11-18 |
| 7413611 | Gas reaction system and semiconductor processing apparatus | — | 2008-08-19 |