Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961718 | Plasma processing method and plasma processing apparatus | Tetsuji Sato | 2024-04-16 |
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Taira Takase | 2023-11-21 |
| 11032899 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Taira Takase | 2021-06-08 |
| 8052364 | Coupling member and plasma processing apparatus | Hachishiro Iizuka | 2011-11-08 |