Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527426 | Substrate processing device | Atsushi Kawabe, Hiroki Oka | 2022-12-13 |
| 10867820 | Substrate transfer device and substrate transfer method | Tsutomu Sakurabayashi | 2020-12-15 |
| 10811289 | Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber | — | 2020-10-20 |
| 10134619 | Connecting mechanism and connecting method of substrate container | Keisuke Kondoh | 2018-11-20 |
| 9732881 | Gate valve and substrate processing system | Shinji Wakabayashi, Keisuke Kondoh | 2017-08-15 |
| 8835873 | Continuous sterilization system | Koji Kawasaki, Daisuke Kakuda, Mitsuo Kamino, Jun Masudome | 2014-09-16 |
| 8758511 | Film forming apparatus and vaporizer | Hachishiro Iizuka, Akira Yasumuro, Koichiro Kimura | 2014-06-24 |
| 8057564 | Exhaust trap device | — | 2011-11-15 |
| 7537628 | Exhaust trap device | — | 2009-05-26 |