Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159798 | Transfer detection method and substrate processing apparatus | Akira Takahashi | 2024-12-03 |
| 11527426 | Substrate processing device | Norihiko Tsuji, Hiroki Oka | 2022-12-13 |
| 11127614 | Substrate transfer method and substrate transfer apparatus | — | 2021-09-21 |
| 10896835 | Processing system | Keisuke Kondoh | 2021-01-19 |
| 6832348 | Semiconductor integrated circuit having self-diagnosis test function and test method thereof | Hideo Miyazawa, Satoshi Hori | 2004-12-14 |
| 4776384 | Method for monitoring copper-alloy tubes for maintaining corrosion resistance and cleanliness factor of their inner surfaces | Katsumi Yasui, Masaki Yamamoto, Koji Nagata, Tetsuro Atsumi, Mamoru Nishikawa | 1988-10-11 |
| 4762168 | Condenser having apparatus for monitoring conditions of inner surface of condenser tubes | Katsumi Yasui, Masaki Yamamoto, Koji Nagata, Tetsuro Atsumi, Mamoru Nishikawa | 1988-08-09 |