Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Hisataka Hayashi, Shinji Himori, Norikazu Yamada, Takeshi Ohse +1 more | 2019-08-20 |
| 8821684 | Substrate plasma processing apparatus and plasma processing method | Akio Ui, Naoki Tamaoki, Takashi Ichikawa, Hisataka Hayashi, Shinji Himori +3 more | 2014-09-02 |