TU

Tomoaki Ukei

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,555,277 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
8262848 Plasma processing apparatus and method Masahide Iwasaki 2012-09-11
7846293 Plasma processing apparatus and method Masahide Iwasaki 2010-12-07
7713431 Plasma processing method Kimihiro Higuchi, Tatsuo Matsudo, Kazuki Denpoh 2010-05-11