Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8262848 | Plasma processing apparatus and method | Masahide Iwasaki | 2012-09-11 |
| 7846293 | Plasma processing apparatus and method | Masahide Iwasaki | 2010-12-07 |
| 7713431 | Plasma processing method | Kimihiro Higuchi, Tatsuo Matsudo, Kazuki Denpoh | 2010-05-11 |