Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152193 | Plasma generation apparatus | Haruka Suzuki | 2021-10-19 |
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Masaru Hori, Haruka Suzuki, Makoto Sekine | 2017-12-26 |
| 9506142 | High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same | Kensuke Sasai | 2016-11-29 |
| 9252000 | Microwave waveguide apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Yusuke Kubota, Masaru Hori | 2016-02-02 |
| 8610353 | Plasma generating apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Hidenori Miyoshi, Masaru Hori, Makoto Sekine | 2013-12-17 |