Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12127407 | Memory device | — | 2024-10-22 |
| 10423066 | Template, imprint device, and manufacturing method of semiconductor device | Masaki Mae | 2019-09-24 |
| 10192793 | Pattern formation method, imprint device, and computer-readable non-volatile storage medium storing drop recipe adjustment program | — | 2019-01-29 |
| 8853100 | Film formation method, film formation apparatus and storage medium | Masanobu Igeta, Jun Sato, Kazuo Yabe, Hitoshi Kato | 2014-10-07 |
| 8562751 | Dry cleaning method of substrate processing apparatus | Isao Gunji, Hitoshi Itoh, Tomonori Umezaki, Yuta Takeda, Isamu Mori | 2013-10-22 |