Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Naofumi Ohashi, Tadashi Takasaki | 2025-08-19 |
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2024-12-10 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2024-09-17 |
| 11891697 | Substrate processing apparatus | Naofumi Ohashi, Takashi Yahata, Yukinori Aburatani | 2024-02-06 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2023-09-05 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2023-09-05 |
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Naofumi Ohashi | 2022-08-23 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2022-05-24 |
| 11343426 | Notifying apparatus, image capturing apparatus, notifying method, and storage medium for making a notification of motion blur | Hiroshi Suzuki | 2022-05-24 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2022-04-26 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Keita ICHIMURA | 2022-03-29 |
| 11019254 | Image processing apparatus, control method for image processing apparatus, and storage medium having correction of effect of virtual light source | Shinya Hirai, Kaori Tajima | 2021-05-25 |
| 10984991 | Substrate processing apparatus | Yasuhiro MIZUGUCHI | 2021-04-20 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Mitsuro Tanabe, Naofumi Ohashi, Eisuke Nishitani, Tadashi Takasaki | 2021-04-13 |
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Kazuhiro Morimitsu, Naofumi Ohashi, Tadashi Takasaki | 2021-04-13 |
| 10934622 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi, Tadashi Takasaki | 2021-03-02 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2021-02-23 |
| 10714316 | Method of manufacturing semiconductor device | Tsukasa Kamakura, Kazuhiro Morimitsu, Hideharu Itatani, Eisuke Nishitani | 2020-07-14 |
| 10685832 | Substrate processing apparatus | Tetsuaki INADA, Naofumi Ohashi | 2020-06-16 |
| 10651068 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2020-05-12 |
| 10541170 | Substrate processing apparatus and method of manufacturing semiconductor device | Takashi Yahata, Naofumi Ohashi | 2020-01-21 |
| 10533250 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2020-01-14 |
| 10503152 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2019-12-10 |
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Keita ICHIMURA | 2019-10-22 |