Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Naofumi Ohashi, Eisuke Nishitani, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Yoshihiko YANAGISAWA, Kazuhiro Yuasa, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |
| 8367566 | Method for manufacturing semiconductor device and method for processing substrate | Atsushi Sano, Hideharu Itatani | 2013-02-05 |
| 8235001 | Substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Sano, Hideharu Itatani | 2012-08-07 |
| 8222161 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Harunobu Sakuma, Tadashi Takasaki | 2012-07-17 |
| 8172950 | Substrate processing apparatus and semiconductor device producing method | Yoshihiko YANAGISAWA | 2012-05-08 |
| 7943528 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Harunobu Sakuma, Tadashi Takasaki | 2011-05-17 |