Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249503 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI | 2025-03-11 |
| 12217959 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hajime Karasawa, Kazuhiro Harada | 2025-02-04 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Takeo Hanashima, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |
| 11967534 | Method of manufacturing semiconductor device | — | 2024-04-23 |
| 11848201 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2023-12-19 |
| 11810781 | Method of processing substrate, substrate processing apparatus, recording medium, method of manufacturing semiconductor device | Kiyohisa ISHIBASHI | 2023-11-07 |
| 11726456 | Substrate processing system | Masanori NAKAYAMA | 2023-08-15 |
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI, Ryota Kataoka | 2023-08-15 |
| 11251038 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2022-02-15 |
| 11251039 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2022-02-15 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Mitsuro Tanabe, Naofumi Ohashi, Eisuke Nishitani, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10847392 | Method of manufacturing semiconductor device | — | 2020-11-24 |
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeo Hanashima, Takafumi Sasaki, Hidenari Yoshida | 2020-10-20 |
| 10784116 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Daigo YAMAGUCHI | 2020-09-22 |
| 10714316 | Method of manufacturing semiconductor device | Kazuhiro Morimitsu, Hideharu Itatani, Eisuke Nishitani, Shun MATSUI | 2020-07-14 |
| 10671056 | Substrate processing system | Masanori NAKAYAMA | 2020-06-02 |
| 10655218 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2020-05-19 |
| 10388512 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Takafumi Sasaki, Hiroaki Hiramatsu | 2019-08-20 |
| 10211110 | Method of manufacturing semiconductor device | Kazuhide Asai | 2019-02-19 |
| 10121650 | Method of manufacturing semiconductor device | — | 2018-11-06 |
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takuro USHIDA, Yoshiro Hirose, Kimihiko NAKATANI | 2018-04-24 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuro USHIDA, Hiroshi Ashihara, Kimihiko NAKATANI | 2018-03-13 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2017-11-28 |
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Daigo YAMAGUCHI, Hiroshi Ashihara, Tsuyoshi Takeda, Taketoshi Sato | 2017-11-28 |
| 9732421 | Substrate processing apparatus | — | 2017-08-15 |