Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose, Satoshi Shimamoto | 2017-05-02 |
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshiro Hirose, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Yoshiro Hirose, Atsushi Sano, Takaaki Noda | 2016-10-18 |
| 9455137 | Method of manufacturing semiconductor device | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2016-09-27 |
| 9449813 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano, Yoshiro Hirose | 2016-09-20 |
| 9378943 | Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2016-06-28 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2016-05-24 |
| 9190298 | Film forming method and recording medium for performing the method | Katsuyoshi Harada, Yoshiro Hirose, Atsushi Sano, Yugo Orihashi | 2015-11-17 |
| 9028648 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kenji Kameda | 2015-05-12 |
| 8946092 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2015-02-03 |
| 8546272 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2013-10-01 |
| 8410001 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yushin Takasawa, Yoshiro Hirose, Yukinao KAGA | 2013-04-02 |