Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164744 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2021-11-02 |
| 10262857 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2019-04-16 |
| 10134584 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2018-11-20 |
| 10090152 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2018-10-02 |
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Yuasa, Atsushi Moriya, Naoharu Nakaiso | 2018-06-12 |
| 9941119 | Method of forming silicon layer in manufacturing semiconductor device and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2018-04-10 |
| 9899211 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Satoshi Shimamoto | 2018-02-20 |
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2017-12-05 |
| 9691609 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2017-06-27 |
| 9540728 | Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2017-01-10 |
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano | 2016-12-13 |
| 9508543 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose | 2016-11-29 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2016-10-04 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2016-10-04 |
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2016-08-09 |
| 9218959 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Satoshi Shimamoto, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2015-12-22 |
| 9190298 | Film forming method and recording medium for performing the method | Katsuyoshi Harada, Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano | 2015-11-17 |
| 9054046 | Method of manufacturing semiconductor device and method of processing substrate | Yoshiro Hirose, Atsushi Sano, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2015-06-09 |
| 8987146 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Satoshi Shimamoto | 2015-03-24 |