Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043392 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Naoharu Nakaiso, Tetsuya Takahashi, Atsushi Moriya | 2021-06-22 |
| 10683253 | Method for producing high-purity terephthalic acid | Goh NAKAMURA, Hideaki Fujita, Ryusuke Shigematsu | 2020-06-16 |
| 10385001 | Method of producing terephthalic acid | Goh NAKAMURA, Hideaki Fujita, Ryusuke Shigematsu | 2019-08-20 |
| 10273197 | Method for producing high-purity terephthalic acid | Goh NAKAMURA, Hideaki Fujita | 2019-04-30 |
| 9941119 | Method of forming silicon layer in manufacturing semiconductor device and recording medium | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2018-04-10 |
| 9691609 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2017-06-27 |
| 9540728 | Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2017-01-10 |
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2016-08-09 |
| 9225288 | Signal generation circuit | Kazuaki Oishi, Masahiro Kudo | 2015-12-29 |
| 8895457 | Method of manufacturing semiconductor device and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Kenji Kameda | 2014-11-25 |
| 8673790 | Method of manufacturing a semiconductor device, method of cleaning a process vessel, and substrate processing apparatus | Naonori Akae, Yoshiro Hirose | 2014-03-18 |
| 8174310 | Quadrature modulation demodulation circuit | Shingo Sakamoto | 2012-05-08 |